MEMSSIM2 - Development of tools for simulation of complex (micro)electromechanical systems

Micro-electromechanical systems (MEMS) are miniature mechatronic systems whose behaviour is a result of close coupling of mechanical, electronic and/or fluidic effects. Therefore, behaviour of the system should be simulated simultaneously by the use of the simulation system where all parts of the system, as well as their interaction, are modelled. The problem of MEMS simulation fundamentally depends on the possibility of defining complex spatially distributed and mutually coupled system models. This seems to be the only way to create novel application-specific MEM systems that may be produced at an affordable cost and within time-to-market limitations. In other words, a simulation system characterised by superb modelling capabilities on diverse levels of abstraction is the key technology for successful and productive MEMS design. When trying to solve a general system, one must be able to easily model the device from different physical aspects by means of the available techniques without too much consideration of spatial discretisation, boundary conditions, convergence problems or limits set by the analogue MEMS simulator. An approach is to employ finite element modelling coupled with analogue hardware description language. Such a design philosophy allows cosimulation of circuit networks, behavioural physical models and physical device models in a unified simulation environment using one simulator system. A simulated system is described using hardware description language and coupling on various levels of abstraction. The aims of the MEMSSIM2 project have been summarised as follows: i. Study of alternatives for coupling FE equations used in device models with the system simulator concept (iterative and time loops, hierarchical and modular approach for coupling between diverse physical models) and definition of communication interface between the analogue HIDL simulator and the FE model library. ii. Application of predefined FE device models of various physical effects processed by analogue HDL. iii. Improvements and alterations of the system matrix solver for solution of both the FE and behavioural system and device equations for larger problems (some 10000 nodes in FE models), within the available simulator. iv. Realisation and testing of the simulation tool. Validation of novel modelling techniques. Application of the simulator in industrial applications, research and education.

Micro-electromechanical systems (MEMS) are miniature mechatronic systems whose behaviour is a result of a close coupling of mechanical, electronic and/or fluidic effects. Therefore, the behaviour of the system should be simulated simultaneously using simulation codes, where all parts of the system, as well as their interaction, are modelled. Simulation of MEMS is strongly dependent on the possibility of defining complex spatially distributed and mutually coupled system models. This seems to be the only way to create novel application-specific MEM systems that may be produced at an affordable cost within time-to-market limitations. In other words, a simulation system characterised by superb modelling capabilities on diverse levels of abstraction is the key technology for a successful and productive MEMS design. When trying to solve a general system, one must be able to easily model the device from different physical aspects by means of available techniques without too much consideration of spatial discretisation, boundary conditions, convergence problems or limits set by analogue MEMS simulators. A promising approach is to employ finite element modelling coupled with analogue hardware description language. Such a design philosophy allows for a cosimulation of circuit networks, behavioural physical models and physical device models within a unified simulation environment using one simulator system. A simulated system is described by a hardware description language including domain coupling on various levels of abstraction. The results of the MEMSSIM2 project can be summarised as follows: - Definition of coupled FE equations used in device models within the system simulator concept - Implementation of several finite elements of various physical effects for use in analogue HDL. - Test of various system matrix solvers for the solution of both FE and behavioural systems as well as device equations for larger problems, all within the available simulator. Validation of novel modelling tools in comparison to commercial FE simulators.