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Hybrid Heterostructure Nanowires

Hybrid Heterostructure Nanowires

Hermann Detz (ORCID: 0000-0002-4167-3653)
  • Grant DOI 10.55776/P26100
  • Funding program Principal Investigator Projects
  • Status ended
  • Start October 1, 2013
  • End June 30, 2018
  • Funding amount € 412,240

Disciplines

Electrical Engineering, Electronics, Information Engineering (50%); Nanotechnology (25%); Physics, Astronomy (25%)

Keywords

    Molecular Beam Epitaxy, Nanowires, Semiconductor Materials, Heterostructures, Nanostructure Synthesis, Nanoelectronic Devices

Abstract Final report

Semiconductor nanowires are a promising geometry for next-generation electronic devices, exploiting the reduced density of states and quantization effects and allowing higher transit frequencies at reduced leakage currents. Additionally, the large surface to volume ratio makes them an ideal candidate for chemical sensing applications or for photovoltaic energy conversion. All these applications benefit from the wide selection of materials, which can be integrated onto the e.g. Si/Ge platform by using epitaxially grown nanowires. Their functionality can be extended further through semiconductor heterostructures, which allow to design the electronic structure for specific applications. The main goal of this project is the fabrication, characterization and optimization of hybrid nanowire heterostructures, consisting of Si/Ge and III-V materials. The small contact area between substrate and nanowire or between two nanowires provides the ability to join materials with different lattice-constant and chemical bonding together and characterize these heterojunctions in an unstrained and defect-free case. In particular, we will investigate the growth of III-V nanowires on Si/Ge nanowires and vice versa. Until now most research work was concentrating on Si/Ge or III-V nanowire heterostructures, therefore the approach to integrate both material groups is a logical consequence. The novelty of such structures requires efforts to establish the epitaxial growth and characterize these hybrid nanowires structurally, optically and electronically. Possible approaches, which are point of investigation in this project, are axial Si/Ge/III-V heterostructures, III-V branches on Si/Ge nanowires and the growth of Si/Ge structures on III-V nanowires. Finally, the combination of all these techniques will allow the fabrication of Si/Ge/III-V nanowire heterostructures with multiple interfaces and III-V quantum dots, embedded into group IV nanowires. For this purpose, we will also investigate novel catalysts for improved heterostructure growth and electrical contacts. The electronic properties of these heterostructures will be investigated by optical experiments and electronic transport studies on single nanowires and small ensembles. This project will therefore provide a way to integrate the flexibility and functionality of III-V heterostructures with Si/Ge established device technology. As these are novel structures, a further goal is the development of prototype devices, which are based on nanowire heterostructures, but allow the integration with planar device geometries. We propose different device geometries, which will allow the integration of epitaxially grown III-V or hybrid nanowires with conventional Si/Ge device fabrication techniques. These devices will be based on silicon-on-insulator substrates, where nanowires will be grown in place without the need for harvesting, positioning and contacting dispersed wires. These will allow to make the transition from growth and material characterization towards functional electronic or optoelectronic devices, which then can be developed further, focusing specific applications.

Nanowires allow the integration of different materials with established silicon-based electronic platforms. This is mainly enabled by the small contact area between nanowire and substrate, which allows efficient relaxation of strain and therefore a defect-free growth. We exploited this principle to address key steps that are of interest for hybrid systems of CMOS electronics with III-V semniconductor-based optoelectronic components. The synthesis of nanowires at well-defined positions in an ultra-high vacuum compatible process a key requirement for device integration was achieved through focused ion beam implantation of Ga arrays into the substrate, which were then used as a catalyst droplets. Compared to other lithography-based techniques, the distinct feature of this process is the complete absence of organic chemicals, which could provide a risk of cross-contamination for epitaxial growth facilities. We furthermore studied the incorporation behavior of boron into GaAs layers and nanowires to enable strain-engineering in future devices. In contrast to other group III elements, B was found to incorporate both at cation and anion sites and therefore leads to p-type conductivity in nominally undoped structures. The unintentional doping could be reduced through optimized growth parameters. In the case of nanowires, we found B-segregation to the surface, which requires further studies but also opens new possibilities for sensing applications. Core-shell nanowires were fabricated to enable future application in optoelectronic devices. GaAs nanowires were used as a basis for radial heterostructures with InGaAs quantum wells for emission wavelengths between 900 1000 nm. Multi-shell structures with identical or varying quantum well widths allow to gain insight in to the carrier distribution within the nanowire, which is strongly influenced by the proximity of surface states. Samples with different quantum well thicknesses always lead to photoluminescence from the outermost rather than the widest quantum well. Understanding these band-bending effects will be a key requirement to pave the way for more complex device prototypes. This project therefore did address three important aspects of III-V nanowires positioning to enable well defined device geometries, the growth of novel materials that are difficult to fabricate in bulk or layer growth and groundbreaking work for the integration of III-V semiconductors with Si for hybrid optoelectronic structures or integrated sensors.

Research institution(s)
  • Technische Universität Wien - 100%

Research Output

  • 127 Citations
  • 15 Publications
Publications
  • 2018
    Title Suppression of axial growth by boron incorporation in GaAs nanowires grown by self-catalyzed molecular beam epitaxy
    DOI 10.1088/1361-6528/aaf11e
    Type Journal Article
    Author Lancaster S
    Journal Nanotechnology
    Pages 065602
    Link Publication
  • 2018
    Title Influence of Boron Antisite Defects on the Electrical Properties of MBE-Grown GaAs Nanowires
    DOI 10.1002/pssb.201800368
    Type Journal Article
    Author Lancaster S
    Journal physica status solidi (b)
    Link Publication
  • 2018
    Title Evaluation of Material Systems for THz Quantum Cascade Laser Active Regions
    DOI 10.1002/pssa.201800504
    Type Journal Article
    Author Detz H
    Journal physica status solidi (a)
    Pages 1800504
    Link Publication
  • 2016
    Title Atomistic modeling of interfaces in III–V semiconductor superlattices
    DOI 10.1002/pssb.201552496
    Type Journal Article
    Author Maier J
    Journal physica status solidi (b)
    Pages 613-622
    Link Publication
  • 2017
    Title Room-Temperature Quantum Ballistic Transport in Monolithic Ultrascaled Al–Ge–Al Nanowire Heterostructures
    DOI 10.1021/acs.nanolett.7b00425
    Type Journal Article
    Author Sistani M
    Journal Nano Letters
    Pages 4556-4561
    Link Publication
  • 2017
    Title Schottky diode formation in GaAs nanowires by heterogeneous contact deposition
    DOI 10.1016/j.matpr.2017.08.003
    Type Journal Article
    Author Lancaster S
    Journal Materials Today: Proceedings
    Pages 7101-7106
    Link Publication
  • 2017
    Title Editorial - Special issue on micro- and nano-patterning
    DOI 10.1016/j.mee.2017.04.029
    Type Journal Article
    Author Detz H
    Journal Microelectronic Engineering
  • 2017
    Title Substrate-emitting ring interband cascade lasers
    DOI 10.1063/1.4989514
    Type Journal Article
    Author Holzbauer M
    Journal Applied Physics Letters
    Pages 171101
    Link Publication
  • 2017
    Title Lithography-free positioned GaAs nanowire growth with focused ion beam implantation of Ga
    DOI 10.1116/1.4973340
    Type Journal Article
    Author Detz H
    Journal Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Proces
    Pages 011803
    Link Publication
  • 2017
    Title Growth rate dependence of boron incorporation into BxGa1-xAs layers
    DOI 10.1016/j.jcrysgro.2017.02.043
    Type Journal Article
    Author Detz H
    Journal Journal of Crystal Growth
    Pages 77-81
    Link Publication
  • 2017
    Title Focused ion beam implantation for the nucleation of self-catalyzed III-V nanowires
    DOI 10.1016/j.mee.2017.03.003
    Type Journal Article
    Author Lancaster S
    Journal Microelectronic Engineering
    Pages 93-97
    Link Publication
  • 2015
    Title Thermal expansion of III–V materials in atomistic models using empirical Tersoff potentials
    DOI 10.1049/el.2015.1302
    Type Journal Article
    Author Detz H
    Journal Electronics Letters
    Pages 1455-1457
    Link Publication
  • 2015
    Title Nucleation of Ga droplets on Si and SiOx surfaces
    DOI 10.1088/0957-4484/26/31/315601
    Type Journal Article
    Author Detz H
    Journal Nanotechnology
    Pages 315601
    Link Publication
  • 2015
    Title Metropolis Monte Carlo based Relaxation of Atomistic III-V Semiconductor Models
    DOI 10.1016/j.ifacol.2015.05.074
    Type Journal Article
    Author Detz H
    Journal IFAC-PapersOnLine
    Pages 550-555
    Link Publication
  • 2013
    Title Atomistic modeling of bond lengths in random and ordered III-V alloys
    DOI 10.1063/1.4821338
    Type Journal Article
    Author Detz H
    Journal Journal of Applied Physics
    Pages 123508

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