Optische Charakterisierung dünner dielektrischer Schichten

Optische Charakterisierung dünner dielektrischer Schichten

Hans K. Pulker (ORCID: )

Disciplines

Physics, Astronomy (100%)

Keywords

    Thin Film, Ionplating, RLVIP IBAD, Photothermal Deflection Spectroscopy, Guided Wave Refractive Index, Extinction Coefficient, Absorption, Coefficient, Absorpt, IBAD, Photothermal D, Refractive Index, Ex, Spectroscopy, Guided, Thin Film, Ionplatin

Research institution(s)

Research Output

  • 18 Citations
  • 1 Publications
Publications
  • 1999
    Title Gas pressures influence on the optical and mechanical properties of Ta2O5 films produced by reactive low voltage ion plating (RLVIP)
    DOI 10.1016/s0040-6090(99)00153-4
    Type Journal Article
    Author Strauss G
    Journal Thin Solid Films
    Pages 53-56