Optische Charakterisierung dünner dielektrischer Schichten

Hans K. Pulker (ORCID: )

Disciplines

Physics, Astronomy (100%)

Keywords

  • Thin Film,
  • Ionplating,
  • RLVIP IBAD,
  • Photothermal Deflection Spectroscopy,
  • Guided Wave Refractive Index,
  • Extinction Coefficient,
  • Absorption,
  • Coefficient,
  • Absorpt,
  • IBAD,
  • Photothermal D,
  • Refractive Index,
  • Ex,
  • Spectroscopy,
  • Guided,
  • Thin Film,
  • Ionplatin
Research institution(s)

Research Output

  • 18 Citations
  • 1 Publications
Publications
  • 1999
    Title Gas pressures influence on the optical and mechanical properties of Ta2O5 films produced by reactive low voltage ion plating (RLVIP)
    DOI 10.1016/s0040-6090(99)00153-4
    Type Journal Article
    Author Strauss G
    Journal Thin Solid Films
    Pages 53-56