Optische Charakterisierung dünner dielektrischer Schichten
Hans K. Pulker
(ORCID: )
Wissenschaftsdisziplinen
Physik, Astronomie (100%)
Keywords
- Thin Film,
- Ionplating,
- RLVIP IBAD,
- Photothermal Deflection Spectroscopy,
- Guided Wave Refractive Index,
- Extinction Coefficient,
- Absorption,
- Coefficient,
- Absorpt,
- IBAD,
- Photothermal D,
- Refractive Index,
- Ex,
- Spectroscopy,
- Guided,
- Thin Film,
- Ionplatin
Forschungsstätte(n)
- Universität Innsbruck - 100%
Research Output
- 18 Zitationen
- 1 Publikationen
Publikationen
-
1999
Titel Gas pressures influence on the optical and mechanical properties of Ta2O5 films produced by reactive low voltage ion plating (RLVIP) DOI 10.1016/s0040-6090(99)00153-4 Typ Journal Article Autor Strauss G Journal Thin Solid Films Seiten 53-56