Synchrotron Radiation induced TXRF
Synchrotron Radiation induced TXRF
Disciplines
Physics, Astronomy (100%)
Keywords
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TOTAL REFLECTION X-RAY FLUORESCENCE ANAL,
ENERGY DISPERSIVE X-RAY FLUORESCENCE ANA,
SYNCHROTRON RADIATION,
ULTRA TRACE ELEMENT ANALYSIS,
WAFER SURFACE CONTAMINATION,
MATERIAL SCIENCE
Research project P 14336 Synchrotron Radiation induced TXRF Christina STRELI 08.05.2000 Total Reflection X-rav Fluorescence Analysis (TXRF) is a special method of energy dispersive X-ray Fluorescence Analysis extending the analytical power to the trace element range (Detection limits in the pg (10-12 g) range). Using Synchrotron radiation (SR) as exciting radiation is features, like wide spectral range, natural collimation and high intensity allows to reduce the detection limits down to the fg(10-15 g) range, but allows also to extend the detectable element range to low Z elements (B, C,...Al) as well as to the Rear Earth Elements (REE). The aim of project is to show the power of the new developed ultra trace analytical technique of SR-TXRF and its applicability in various fields of analytical problems. Four different topics should be investigated: * The quality controll of semiconductor surface contamination (on and below surface) for low Z elements, specially Na and Al - performed at SSRL, Stanford USA, in cooperation with SSRL and Wacker Siltronic, Burghausen D. The obtained detection limits should reach the demanded values of the SEMATEC roadmap (3E8 atoms/cm2 for Na). * Investigation of low Z elements Boron, Carbon and Oxygen on semiconductor surfaces - performed at BESSY2, Berlin in cooperation with PTB-Berlin and Wacker Siltronic. * Investigation of steels samples from reactor pressure vessels, determination of exposed neutron dose by determination of Nb content- performed at HASYLAB, Hamburg in cooperation with CRPP, Lausanne, CH. * Determination of REE by K-shell excitation in special Low activity stee for fusion wall materials- performed at HASYLAB, in cooperation with CRPP. Within the mentioned international cooperations the performance of SR-TXRF should be improved by improving detection and excitation conditions and the technique should be applied to various analytical problems in industry (semiconductor industry) and research (fission and fusion research).
- Technische Universität Wien - 100%
- Peter Wobrauschek, Technische Universität Wien , associated research partner
Research Output
- 128 Citations
- 7 Publications
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2004
Title Nondestructive dose determination and depth profiling of arsenic ultrashallow junctions with total reflection X-ray fluorescence analysis compared to dynamic secondary ion mass spectrometry DOI 10.1016/j.sab.2004.04.014 Type Journal Article Author Pepponi G Journal Spectrochimica Acta Part B: Atomic Spectroscopy Pages 1243-1249 -
2003
Title Analysis of low Z elements on Si wafer surfaces with undulator radiation induced total reflection X-ray fluorescence at the PTB beamline at BESSY II DOI 10.1016/j.sab.2003.05.008 Type Journal Article Author Streli C Journal Spectrochimica Acta Part B: Atomic Spectroscopy Pages 2113-2121 -
2003
Title Analysis of organic contaminants on Si wafers with TXRF-NEXAFS DOI 10.1016/s0584-8547(03)00217-9 Type Journal Article Author Pepponi G Journal Spectrochimica Acta Part B: Atomic Spectroscopy Pages 2245-2253 -
2003
Title Comparison of synchrotron radiation total reflection X-ray fluorescence excitation–detection geometries for samples with differing matrices DOI 10.1016/s0584-8547(03)00220-9 Type Journal Article Author Pepponi G Journal Spectrochimica Acta Part B: Atomic Spectroscopy Pages 2139-2144 -
2002
Title Total Reflection X-ray Fluorescence Analysis (TXRF) using the high flux SAXS camera DOI 10.1016/s0168-9002(02)00463-1 Type Journal Article Author Wobrauschek P Journal Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detector Pages 569-572 -
2001
Title Synchrotron radiation total reflection X-ray fluorescence and energy dispersive X-ray fluorescence analysis on AP1â„¢ films applied to the analysis of trace elements in metal alloys for the construction of nuclear reactor core components: a comparison DOI 10.1016/s0584-8547(01)00317-2 Type Journal Article Author Pepponi G Journal Spectrochimica Acta Part B: Atomic Spectroscopy Pages 2063-2071 -
2014
Title Novel Method to Study Neutron Capture of U235 and U238 Simultaneously at keV Energies DOI 10.1103/physrevlett.112.192501 Type Journal Article Author Wallner A Journal Physical Review Letters Pages 192501 Link Publication