Smart Ion Projection Optics for Single-Digit Nanopatterning

Martin Sieberer (ORCID: )

Disciplines

Electrical Engineering, Electronics, Information Engineering (20%); Computer Sciences (20%); Physics, Astronomy (60%)

Keywords

  • Teilchenoptik,
  • Ionen-Multistrahl Technologie,
  • Oberflächenstrukturierung,
  • Nanoelektronik
Research institution(s)
Project participants
  • Elmar Platzgummer, associated research partner