Smart Ion Projection Optics for Single-Digit Nanopatterning

Smart Ion Projection Optics for Single-Digit Nanopatterning

Martin Sieberer (ORCID: )

Disciplines

Electrical Engineering, Electronics, Information Engineering (20%); Computer Sciences (20%); Physics, Astronomy (60%)

Keywords

    Teilchenoptik, Ionen-Multistrahl Technologie, Oberflächenstrukturierung, Nanoelektronik

Research institution(s)
Project participants
  • Elmar Platzgummer, associated research partner