Dynamik von Micro-Puls-Plasmen
Dynamik von Micro-Puls-Plasmen
Herbert Störi
(ORCID: )
Disciplines
Other Technical Sciences (20%); Physics, Astronomy (80%)
Keywords
-
Plasma-CVD,
PACVD,
Gepulste Gleichstrom-Entladung,
Hart- stoffe TSP,
Gleichstrom-Entladun,
Plasma-CVD,
PACVD,
G,
Stoffe,
TSP
Research institution(s)
- Technische Universität Wien - 100%
Project participants
- Johann Laimer, Technische Universität Wien , associated research partner
Research Output
- 127 Citations
- 7 Publications
Publications
-
2005
Title Discrimination Efficacy of Fecal Pollution Detection in Different Aquatic Habitats of a High-Altitude Tropical Country, Using Presumptive Coliforms, Escherichia coli, and Clostridium perfringens Spores DOI 10.1128/aem.71.1.65-71.2005 Type Journal Article Author Byamukama D Journal Applied and Environmental Microbiology Pages 65-71 Link Publication -
2004
Title Eubacterial 16S-rDNA amplicon profiling: a rapid technique for comparison and differentiation of heterotrophic plate count communities from drinking water DOI 10.1016/j.ijfoodmicro.2003.08.014 Type Journal Article Author Farnleitner A Journal International Journal of Food Microbiology Pages 333-345 -
2003
Title Plasma dynamics as a key to successful upscaling of pulsed plasma processes DOI 10.1016/s0257-8972(03)00423-7 Type Journal Article Author Laimer J Journal Surface and Coatings Technology Pages 118-123 -
2001
Title Is there a way to improve the uniformity of TiN deposition conditions in large pulsed d.c. plasma CVD reactors? DOI 10.1016/s0042-207x(01)00148-8 Type Journal Article Author Kugler C Journal Vacuum Pages 379-383 -
2001
Title Dynamics of pulsed d.c. discharges used for PACVD – effect of additional high voltage pulses DOI 10.1016/s0257-8972(01)01208-7 Type Journal Article Author Kugler C Journal Surface and Coatings Technology Pages 424-428 -
1999
Title Dynamics of a pulsed DC discharge used for plasma-assisted chemical vapor deposition — a case study for titanium nitride deposition DOI 10.1016/s0257-8972(99)00486-7 Type Journal Article Author Beer T Journal Surface and Coatings Technology Pages 331-336 -
1999
Title Inhomogeneous deposition of TiN by pulsed PACVD caused by a plasma dynamic effect DOI 10.1016/s0257-8972(99)00257-1 Type Journal Article Author Beer T Journal Surface and Coatings Technology Pages 1016-1023