Angular and energydistribution of scattered electrons

EPMA (ElectronProbeMicroAnalysis) is a powerful tool for non destructive surface analysis. The exact knowledge of the angular distribution as well as the energy distribution of backscattered and transmitted electrons is extremely important for the depth distribution function and consequently for accurate results. The angular and energy distribution of backscattered electrons obtained at various acceleration voltages (5-30 kV) and angles of incidence (90 o -20o ) shall be measured for 25 elements. Moreover the angular and energy distribution of electrons transmitted through thin foils shall be studied. The resulting database shall be used for improvements of MC calculations and of the multiple scattering model developed at the Institute for Applied and Technical Physics, TU Vienna.