Liquid Phase Deposition of Silicon-Heterostructures

This application targets to study and explore the liquid phase deposition of silicon heterostructures. Solution processing of silicon based electronic devices has attracted considerable attention owing to the possibility of low-cost fabrication by printing processes. For this project previously unknown heteroelement substituted higher silicon hydrides which contain one or more heteroatoms covalently linked to silicon shall be synthesized. The resulting materials, shall then be applied as single source precursors for the deposition of functional silicon films. In case of a successful performance of the project novel classes of functionalized higher silicon hydrides will be available for the first time. Additionally, the planned research work will provide access to previously unknown processes for the manufacturing of silicon heterostructures of high significance for academic and industrial electronics research.

In summary a variety of functionalized hydropolysilanes were prepared during this project. Moreover, we could show that these derivatives are ideal single source precursors for a variety of deposition techniques. Furthermore, we have shown that the incooperation and the content of heteroatoms in the films is almost identical to the starting material. This can be seen as proof of our concept. Based on this fact, we are convinced that these molecules are innovative, advanced materials for the next generation of the semiconductor industry. With the help of a recently approved CD lab, we will further explore this chemistry, which could lead to the realization of our materials as semiconductors and support the European Chip Act.