Kinetik der Diamantabscheidung mit Halogeniden

Kinetik der Diamantabscheidung mit Halogeniden

Johann Laimer (ORCID: )

Disciplines

Chemical Process Engineering (20%); Physics, Astronomy (80%)

Keywords

    Diamant Hochfrequenzplasma Plasmachemie Halogenide Massenspektrometrie, Diamant, Halogenide, Hochfrequenzplasma, Massenspektrometrie, Plasmachemie

Research institution(s)
Project participants

Research Output

  • 27 Citations
  • 7 Publications
Publications
  • 2016
    Title Entropy and Source Coding for Integer-Dimensional Singular Random Variables
    DOI 10.1109/tit.2016.2604248
    Type Journal Article
    Author Koliander G
    Journal IEEE Transactions on Information Theory
    Pages 6124-6154
    Link Publication
  • 2014
    Title Entropy for Singular Distributions
    DOI 10.1109/isit.2014.6875281
    Type Conference Proceeding Abstract
    Author Pichler G
    Pages 2484-2488
  • 2003
    Title Limitations in the time resolution of quadrupole mass spectrometry using a flushed extraction probe
    DOI 10.1016/s1387-3806(02)00866-7
    Type Journal Article
    Author Laimer J
    Journal International Journal of Mass Spectrometry
    Pages 301-312
  • 2003
    Title Diamond deposition with chlorinated methanes: investigation of the plasma chemistry
    DOI 10.1016/s0257-8972(03)00450-x
    Type Journal Article
    Author Laimer J
    Journal Surface and Coatings Technology
    Pages 938-942
  • 2003
    Title Time-resolved study of the conversion of chlorinated hydrocarbons in non-equilibrium hydrogen plasmas
    DOI 10.1016/s0042-207x(02)00739-x
    Type Journal Article
    Author Laimer J
    Journal Vacuum
    Pages 213-217
  • 2001
    Title Investigation of the plasma chemistry relevant for diamond deposition with chlorinated hydrocarbons
    DOI 10.1016/s0042-207x(01)00138-5
    Type Journal Article
    Author Misslinger G
    Journal Vacuum
    Pages 413-417
  • 2001
    Title Mass spectrometry with a time resolution of a few milliseconds using a helium flushed probe system
    DOI 10.1016/s0042-207x(01)00140-3
    Type Journal Article
    Author Laimer J
    Journal Vacuum
    Pages 435-439